개요

The Ultratech 4700 is a stepper model that is capable of patterning features on rowbars utilizing an alternate alignment system called the Machine Vision System (MVS). The model 6700 extends the capabilities of the model 4700 into the submicron range by utilizing i-line exposure. In addition, the company provides three steppers, including the model 1700 MVS and 1700 ABS, which are used to expose the Air Bearing Surface (ABS) pattern, and the model 1800, which extends capabilities to much smaller submicron patterns used for pole trimming.