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설명
Structure: Vapor deposition chamber, radical chamber, sputtering chamber Turbo molecular pump TMP-303LM <Vapor deposition chamber> Organic resistance heating x 10 points, metal zone x 4 points, resistance heating evaporation sources 2 boats/1 set, exhaust CRYO-U, Film controller CRTM-9000 (5 types for sensor organics, 2 types for metals), 2 constant current power supplies, high current power <radical chamber> O2 gas, RF200W <sputtering chamber> ITO sputtering, DC2kW, substrate heating possible, turbo molecule Pump TMP-803L G Box: VAC Model: VAC102282-OMNI-LAB 3φ200V 50/60Hz Approx. 59.4kVA환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음
ULVAC
Mini-Lab
카테고리
Thermal Evaporators
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
70795
웨이퍼 사이즈:
알 수 없음
빈티지:
2010
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설명
Structure: Vapor deposition chamber, radical chamber, sputtering chamber Turbo molecular pump TMP-303LM <Vapor deposition chamber> Organic resistance heating x 10 points, metal zone x 4 points, resistance heating evaporation sources 2 boats/1 set, exhaust CRYO-U, Film controller CRTM-9000 (5 types for sensor organics, 2 types for metals), 2 constant current power supplies, high current power <radical chamber> O2 gas, RF200W <sputtering chamber> ITO sputtering, DC2kW, substrate heating possible, turbo molecule Pump TMP-803L G Box: VAC Model: VAC102282-OMNI-LAB 3φ200V 50/60Hz Approx. 59.4kVA환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음