설명
FRT MicroProf FE Metrology (Bow, Thickness, TTV) SMIF: 2x Brooks Verrsaport 2200 Loadports (Fortrend not supported) SEMI E84 compatible Wafer Handling: GaAs, Si, Sapphire with +/- 200 µm Bow and 4 mm Thickness Different Wafer cassettes (13 / 25 slot) possible Prealigner, OCR Reader CWL 3 mm (Wafer Bow, Wafer Thickness) WLI / CFM OT (Chip Topography) IRT 80 (Film Thickness) FTR UV-VIS-NIR (Thin Film Thickness) MTBF / MTBA / MTTR / Uptime: > 500 h / 50 h / 4 h / > 95 %환경 설정
Wafer Bow, EPI Thickness, TTVOEM 모델 설명
미제공문서
FRT
MICROPROF
카테고리
Thin Film / Film Thickness
마지막 검증일: 12일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
142372
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available