설명

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환경 설정

▪TFMS version: V3.31a7 based on DOS ▪Measurement tool : BPR, BPE, VAS BPR - Beam Profile Reflectometry : still the best way to characterize dielectric films BPE - TWI patented Beam Profile Ellipsometer VAS(Visible Spectroscopy) : 470-800 nm ▪SBC boardwithCPU Pentium Ⅲ 600 MHz ▪Cognex 3000 ▪Overhauled all systems and Robot, Controller(ESC200)

OEM 모델 설명

The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.