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설명
Stress Measurement환경 설정
환경 설정 없음OEM 모델 설명
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.문서
문서 없음
KLA
FLX 5400
카테고리
Thin Film / Film Thickness
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
122869
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
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설명
Stress Measurement환경 설정
환경 설정 없음OEM 모델 설명
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.문서
문서 없음