개요

The FUSION M150PC, manufactured by AXCELIS, is a photostabilizer system used in the semiconductor industry. It is designed to work with 6-inch wafer sizes. The system belongs to the Microlite 150 series and is known for its ability to provide a clean and efficient one-step process for hardening photoresists. It offers high production throughputs, making it suitable for semiconductor manufacturing applications where photoresist hardening is required