F-REX300
카테고리
CMP개요
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.
활성 등재물
11
서비스
검사, 보험, 감정, 물류
