설명
설명 없음환경 설정
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 모델 설명
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.문서
문서 없음
ASYST
SPARTAN
검증됨
카테고리
Wafer Handling
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
60881
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
ASYST
SPARTAN
검증됨
카테고리
Wafer Handling
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
60881
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 모델 설명
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.문서
문서 없음