설명
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AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM 모델 설명
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AKRION
REARMOUNT
카테고리
Wet Benches - Auto
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
132894
웨이퍼 사이즈:
6"/150mm
빈티지:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM 모델 설명
미제공문서
문서 없음