SCREEN / DNS / DAINIPPON SCREEN SS-W80A-A

설명

Loading Position：Left Side Indexer：A Type 2-Surface pins Brush & D-Sonic

환경 설정

General Information Computer Version: FC-9801B Model2 Qty. 1 Software Version: V534H Software Type: English SMIF/Non-SMIF Type Qty.4 Electricity: Transformer Type Qty.1 Loading Position Type Left Side Backup Disk Qty.1 Wafer Specification Wafer Size: 200mm Wafer Shape: SNNF Chamber Type/ Location Selected Option Spin Scrubber SS Unit Qty.2 Customer Fab Options Electrical Requirements Line Frequency: 50 Hz Power: 208V System Safety Equipment EMO Switch Type: TURN TO RELEASE EMO ETI COMPLIANT EMO Guard Ring: INCLUDED Indexer Cassette Detection Sensor Qty. 4 Position of Mapping Sensor Qty.4 Indexer Type A Type Main Arm Unit Main Arm Material of Wafer Guide/Wafer support PEEK Spin Unit SSW Unit Options Number of SS Unit Qty.2 Arm 1 Nozzle Type D-Sonic Arm 2 Nozzle Type Brush Brush Arm Type Auto Others Selected Option Tower Lamp: 3 Color Emergency Stop: EMO Switch Leak Sensor: Yes Main N2 Pressure sensor: Yes Main CDA Pressure sensor: Yes Main Vacuum Pressure sensor: Yes Main Exhaust Pressure sensor: Yes UPS: Yes