설명

REQUIRED REPAIRS: Repair failed ozone generation cell(s) in MKS AX8403L Ozone generator, Rev. 1B or trade in for MKS AX8407 Computer upgrade to eliminate intermittent boot failures and reboot loops. Replace front user interface (current one is cut-off slightly and distorted at bottom of screen) RUI works, but an upgrade was suggested. Install water flow interlock switch (we have the part, just haven't installed it). Currently by-passed

환경 설정

Semitool main system: Model: Spray Acid Tool (SAT) single-bowl, 24”, ozone HydrOzone and FluorOzone process Process Technology DI water heater, 24 kW: Model #: HCQ24-208-3-002-08 Electrical Specs: 24000 W, 208 V a.c., 3 phase INUSA Ozone Generator and Leak Detection system: Semitool Ozone Delivery System model OZOMOD-STI-HO-0 INUSA SCI-MUX Controller INUSA RB-5L Alarm De-Multiplexing INUSA IN2000-5 Multi-Channel Low-Concentration Analyzer INUSA Power Control Module INUSA Flow Control Panel Ozone Generator A: MKS AX8403L Ozone generator, Rev. 1B CO2 Fire Detection and Suppression System Fire Suppression Systems Inc. Kidde Scorpio Control Panel with Dual Spectrum Detection Spares & Additional Parts: Spares kit that still has most of the parts including a White Knight pump Ozone destruct upgrade (never installed): INUSA Heated Catalytic Destruct Module, CAT03-H. Manganese oxide ozone destruct catalyst media Other various spares including some valve actuators Cleanroom and CD system manuals

OEM 모델 설명

The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.