설명
Tool Status: Online환경 설정
Process: XRD_Bruker Software Version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Chamber Components: Tool's Recipe Capability Multiple Recipe Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed BEOL,FEOL,HK,MOL,N2BEOEM 모델 설명
The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.문서
문서 없음
BRUKER
D8 FABLINE
검증됨
카테고리
X-Ray / XRD / XRF
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
105054
웨이퍼 사이즈:
12"/300mm
빈티지:
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BRUKER
D8 FABLINE
카테고리
X-Ray / XRD / XRF
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
105054
웨이퍼 사이즈:
12"/300mm
빈티지:
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Tool Status: Online환경 설정
Process: XRD_Bruker Software Version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Chamber Components: Tool's Recipe Capability Multiple Recipe Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed BEOL,FEOL,HK,MOL,N2BEOEM 모델 설명
The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.문서
문서 없음