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설명
3 reactors ASM Eagle XP8 Plasma Enhanced ALD Tool환경 설정
XP8 Platform Front and rear Operations/Maintenance Touch Screen with pen Loader module transfer robot and controller with 3 load ports. 2 Load locks Wafer cooling chamber Four BOC Edwards dry pump (subject to availability) Exhausted gas box with 8 MFC capability per chamber 2 RF generators and controller per chamber Remote plasma cleaning (RPU) per chamber Two RF matchers per chamberOEM 모델 설명
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.문서
ASM
EAGLE XP8
카테고리
ALD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled
제품 ID:
101682
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
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