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Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM 모델 설명
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.문서
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EBARA
F-REX300
카테고리
CMP
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
105057
웨이퍼 사이즈:
12"/300mm
빈티지:
2010
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설명
설명 없음환경 설정
Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM 모델 설명
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.문서
문서 없음