설명

Asset Description I-LINE TRACK ACT-8 Software Version 1.18.002 CIM SECS Process COAT / DEV Excluded Items List (Pumps, Chillers & Abatement are all excluded)

환경 설정

System Type Description Quantity Main System MAIN BODY 1 Handler System ROBOT (PRA) 1 Handler System ROBOT (IRA) 1 Factory Interface SMIF 4 Others Handler System ROBOT (CRA) 1 Options System Description Quantity SHINWA T&H 1

OEM 모델 설명

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.