설명
Clean Track Lithius Pro - Coater / Developer환경 설정
Details Attached Main Configuration: Carrier Station (Loader) Process Block (Coater/Developer Cups) COT Cabinet (Coater Chemical Cabinet) DEV Cabinet (Developer Chemical Cabinet) Dev Cabinet Coater (QTY 6) Developer (QTY 9)OEM 모델 설명
The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.문서
카테고리
Coaters & Developers
마지막 검증일: 3일 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
Deinstalled
제품 ID:
155171
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
TEL / TOKYO ELECTRON
LITHIUS Pro
카테고리
Coaters & Developers
마지막 검증일: 3일 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
Deinstalled
제품 ID:
155171
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available