설명

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환경 설정

PH_DUVArF

OEM 모델 설명

The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT - 200mm or 300mm, more modules and faster throughput (150 wph).

문서

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TEL / TOKYO ELECTRON

LITHIUS

검증됨

카테고리

Coaters & Developers

마지막 검증일: 어제

주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

144680

웨이퍼 사이즈:

12"/300mm

빈티지:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

유사 등재물