설명
Developer환경 설정
– SMIF Load – (2) DEV Develop Process Stations – CWH Cup Washer Holder – (2) TRS Trasfer Stations – (2) SMIF I/O – Bowl 1: (2) NDL Nozzle, FIRM Surfactant, H2O Rinse – Bowl 2: GP nozzle, H2O Rinse, No bake/cool platesOEM 모델 설명
The CLEAN TRACK™ ACT™ M incorporates three separate high-performance application modules: photomask developer, resist coater, and PEB (Post-Exposure Bake) oven. The system provides sophisticated process control and techniques in the photomask manufacturing process to meet the advanced requirements from industry for OPC(Optical Proximity Correction), phase shifting, and the use of chemical amplification resists. The system extends TEL's long-standing semiconductor and FPD coating and developing technology, and achieves high reliability by adopting CLEAN TRACK™ ACT™ technology.문서
문서 없음
TEL / TOKYO ELECTRON
ACT M
검증됨
카테고리
Coaters & Developers
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
31267
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기TEL / TOKYO ELECTRON
ACT M
검증됨
카테고리
Coaters & Developers
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
31267
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Developer환경 설정
– SMIF Load – (2) DEV Develop Process Stations – CWH Cup Washer Holder – (2) TRS Trasfer Stations – (2) SMIF I/O – Bowl 1: (2) NDL Nozzle, FIRM Surfactant, H2O Rinse – Bowl 2: GP nozzle, H2O Rinse, No bake/cool platesOEM 모델 설명
The CLEAN TRACK™ ACT™ M incorporates three separate high-performance application modules: photomask developer, resist coater, and PEB (Post-Exposure Bake) oven. The system provides sophisticated process control and techniques in the photomask manufacturing process to meet the advanced requirements from industry for OPC(Optical Proximity Correction), phase shifting, and the use of chemical amplification resists. The system extends TEL's long-standing semiconductor and FPD coating and developing technology, and achieves high reliability by adopting CLEAN TRACK™ ACT™ technology.문서
문서 없음