설명
Main System - INSPECTION UNIT Handler System - Robot Factory Interface - FOUP Others - Pillar환경 설정
Software Version - 6.3.24.3 CIM - SECS/GEM Process - Darkfield InspectionOEM 모델 설명
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.문서
문서 없음
유사 등재물
모두 보기
KLA
AIT XUV
카테고리
Defect Inspection
마지막 검증일: 8일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
146761
웨이퍼 사이즈:
12"/300mm
빈티지:
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Main System - INSPECTION UNIT Handler System - Robot Factory Interface - FOUP Others - Pillar환경 설정
Software Version - 6.3.24.3 CIM - SECS/GEM Process - Darkfield InspectionOEM 모델 설명
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.문서
문서 없음