설명
설명 없음환경 설정
Novellus Inova XT PVD 300mm wafer, Sputter, Preclean, Dual Brooks Robot Transfer Tool Configuration: - MAG7 Brooks Robots - MC3 Novellus Module controller - Pfeiffer Turbo and turbo controller - 3 CTI/Hilex/Brooks Cryo pump - Brooks FOUP cassette wafer loader - VAT throttle valve and controllers - AE PDX 5000 RF Generator - AE RFG 5500 RF Generator - MKS RF Generator - DC power supply - Right Degas Chamber - PVD chamber - Preclean Chamber - Left Degas Chamber - Transfer Module with dual blade - And many more: see attached fileOEM 모델 설명
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).문서
LAM RESEARCH / NOVELLUS
INOVA xT
검증됨
카테고리
Deposition
마지막 검증일: 6일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
114437
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH / NOVELLUS
INOVA xT
카테고리
Deposition
마지막 검증일: 6일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
114437
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available