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LAM RESEARCH CORPORATION RAINBOW 4520i
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    OEM 모델 설명
    The Rainbow® 4520i system is a single wafer, vacuum load-locked low pressure oxide system with two active processing chambers. It is designed for integrated isotropic/anisotropic profile on high aspect ratio contact and via structures. The Isotropic Module adds isotropic oxide etching capabilities to the existing anisotropic capabilities of the Rainbow 4520, providing excellent aluminum step coverage. The Isotropic Module is incorporated onto the entrance load-lock on the Rainbow 4520, requiring only one additional wafer handling step. Having two chambers on a single machine greatly reduces the possibility of cross contamination between processes, which minimizes wafer breakage and defect densities. The system has a high uptime of ≥ 85% and is capable of isotropic etching for dielectric (oxide) films. The Rainbow® 4520i system has several applications, including contact etch, planarization, via etch, trench mask etch, and pad etch.
    문서

    문서 없음

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

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    검증됨

    카테고리
    Dry / Plasma Etch

    마지막 검증일: 60일 이상 전

    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    98852


    웨이퍼 사이즈:

    알 수 없음


    빈티지:

    알 수 없음


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    유사 등재물
    모두 보기
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch
    빈티지: 0조건: 중고
    마지막 검증일60일 이상 전

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    verified-listing-icon
    검증됨
    카테고리
    Dry / Plasma Etch
    마지막 검증일: 60일 이상 전
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    주요 품목 세부 정보

    조건:

    Used


    작동 상태:

    알 수 없음


    제품 ID:

    98852


    웨이퍼 사이즈:

    알 수 없음


    빈티지:

    알 수 없음


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    설명
    설명 없음
    환경 설정
    환경 설정 없음
    OEM 모델 설명
    The Rainbow® 4520i system is a single wafer, vacuum load-locked low pressure oxide system with two active processing chambers. It is designed for integrated isotropic/anisotropic profile on high aspect ratio contact and via structures. The Isotropic Module adds isotropic oxide etching capabilities to the existing anisotropic capabilities of the Rainbow 4520, providing excellent aluminum step coverage. The Isotropic Module is incorporated onto the entrance load-lock on the Rainbow 4520, requiring only one additional wafer handling step. Having two chambers on a single machine greatly reduces the possibility of cross contamination between processes, which minimizes wafer breakage and defect densities. The system has a high uptime of ≥ 85% and is capable of isotropic etching for dielectric (oxide) films. The Rainbow® 4520i system has several applications, including contact etch, planarization, via etch, trench mask etch, and pad etch.
    문서

    문서 없음

    유사 등재물
    모두 보기
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch빈티지: 0조건: 중고마지막 검증일:60일 이상 전
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch빈티지: 0조건: 중고마지막 검증일:60일 이상 전
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch빈티지: 0조건: 중고마지막 검증일:60일 이상 전