
설명
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.환경 설정
Vacuum Pump and Chiller IncludedOEM 모델 설명
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 25일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled / Crated
제품 ID:
123899
웨이퍼 사이즈:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
빈티지:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
XACTIX CVE
카테고리
Dry / Plasma Etch
마지막 검증일: 25일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled / Crated
제품 ID:
123899
웨이퍼 사이즈:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
빈티지:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.환경 설정
Vacuum Pump and Chiller IncludedOEM 모델 설명
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.문서
문서 없음