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Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120A환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음
ULVAC
NE-950
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
79021
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
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설명
Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120A환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음