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Brand : ASM America Type : EPSILON ONE, converted to E2000 Wafer size: 6” standard pitch/tall pitch ASM carriers, 8” compatible Bernoulli wand ATM reactor Gas system : TCS with ASM LVC, from separate LPE bubbler Diluted dopant flow for 1 line of N-dope and 1 line P-dope 5 port MPI injector Swing gate valve Software Vs 7.25.03 Host control.OEM 모델 설명
The ASM Epsilon E2000 is a single-wafer epitaxy tool designed to accommodate various epitaxy applications. It covers a wide range of processes, including high-temperature silicon for wafer preparation and low-temperature selective or non-selective Silicon Germanium (SiGe) for creating transistor strain layers. The system is optimized for processing 150mm and 200mm wafers, offering flexibility and precision in epitaxial growth processes.문서
ASM
EPSILON E2000
검증됨
카테고리
Epitaxial deposition (EPI)
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Idle
제품 ID:
91299
웨이퍼 사이즈:
6"/150mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
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ASM
EPSILON E2000
카테고리
Epitaxial deposition (EPI)
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Idle
제품 ID:
91299
웨이퍼 사이즈:
6"/150mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available