ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.

The ASM Epsilon E2000 is a single-wafer epitaxy tool designed to accommodate various epitaxy applications. It covers a wide range of processes, including high-temperature silicon for wafer preparation and low-temperature selective or non-selective Silicon Germanium (SiGe) for creating transistor strain layers. The system is optimized for processing 150mm and 200mm wafers, offering flexibility and precision in epitaxial growth processes.

ASM

EPSILON E2000

Epitaxial deposition (EPI)

유사 등재물

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

EPSILON E2000

Epitaxial deposition (EPI)

유사 등재물

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000

ASM

EPSILON E2000