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환경 설정

Mask : 7inch mask Slit : 3.0mm Currently intensity : around 400mW/cm2 (1.8kW) Configuration: - Main body - Control box - Lamp power supply - CTC/TDC unit - Exhaust fan

OEM 모델 설명

The Canon MPA-600FA is a high-throughput mirror projection mask aligner delivers stable performance ideal for VLSI chip production, boasting a 1.5um resolution and +/- 6um depth-of-focus across the entire field for 4”, 5”, and 6” wafers. With field-proven auto alignment via laser scanning, target placement in scribe lines, and seamless compatibility for mix-and-match with steppers, it's a top-tier solution for precision alignments.