설명
Dark-field laser surface-defect monitor환경 설정
Detection method: Dark-field laser scatter PSL sensitivity: 0.152 µm (152 nm) Size classes: 0.15 / 0.2 / 0.3 / 0.5 / 1.0 / 3.0 / 5.0 µm+ Scan motion: XY stage; substrate moves under the objective Output: XY defect map and size-class histogram Data storage: Scan files recalled from database Edge exclusion: Configurable in millimeters Reticle / mask: Glass-side scanning with system modification Pellicle: Feasibility testing available Non-silicon substrates: Substrate-specific PSL calibration required for accurate size classification Controller: Integrated laptop and software Power: 115 VAC Vacuum: Facility supply requiredOEM 모델 설명
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.문서
문서 없음
카테고리
Metrology
마지막 검증일: 3일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
153184
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SILVER SAGE PRECISION
SDMxy100
카테고리
Metrology
마지막 검증일: 3일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
153184
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Dark-field laser surface-defect monitor환경 설정
Detection method: Dark-field laser scatter PSL sensitivity: 0.152 µm (152 nm) Size classes: 0.15 / 0.2 / 0.3 / 0.5 / 1.0 / 3.0 / 5.0 µm+ Scan motion: XY stage; substrate moves under the objective Output: XY defect map and size-class histogram Data storage: Scan files recalled from database Edge exclusion: Configurable in millimeters Reticle / mask: Glass-side scanning with system modification Pellicle: Feasibility testing available Non-silicon substrates: Substrate-specific PSL calibration required for accurate size classification Controller: Integrated laptop and software Power: 115 VAC Vacuum: Facility supply requiredOEM 모델 설명
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.문서
문서 없음