개요

The Olympus MX61L is a microscope designed for inspecting semiconductors with a 300mm frame. It offers high-quality imaging through various observation techniques, including brightfield, darkfield, differential interference contrast (DIC), fluorescence, infrared, and deep UV. This microscope is part of the Olympus Semiconductor & Flat Panel Display Inspection Solution and is an extended frame version of the MX61 microscope, capable of handling 300mm wafers and flat panels up to 24x24 inches.