설명
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafers환경 설정
-Cu, TA , Etcher -Missing pumpOEM 모델 설명
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.문서
문서 없음
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
검증됨
카테고리
MOCVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
66181
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
카테고리
MOCVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
66181
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafers환경 설정
-Cu, TA , Etcher -Missing pumpOEM 모델 설명
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.문서
문서 없음