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설명
CVD Tool Info. Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz Status: Storing at our facility(under temp & humid control) [Chamber A, B, C ] Process: PECVD Gas Config Maker: Aera FC 786C/ Unit:SLM Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3) RPC : MKS_AX7657 11 (2L) HF Generator: AD TEC_AX 1000III LF Generator: AD TEC_AX 1000LFIII환경 설정
CVDOEM 모델 설명
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.문서
문서 없음
유사 등재물
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ASM
EAGLE 12
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
49088
웨이퍼 사이즈:
12"/300mm
빈티지:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
CVD Tool Info. Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz Status: Storing at our facility(under temp & humid control) [Chamber A, B, C ] Process: PECVD Gas Config Maker: Aera FC 786C/ Unit:SLM Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3) RPC : MKS_AX7657 11 (2L) HF Generator: AD TEC_AX 1000III LF Generator: AD TEC_AX 1000LFIII환경 설정
CVDOEM 모델 설명
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.문서
문서 없음