설명
PECVD환경 설정
[Chamber A] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber B] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000W [Chamber C] Process: P-TEOS/TMP Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60) RPU: 400kHz/3000W HRF: 13.56MHz/1000W LRF: 430kHz/1000WOEM 모델 설명
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.문서
유사 등재물
모두 보기
ASM
EAGLE 12
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
35057
웨이퍼 사이즈:
12"/300mm
빈티지:
2013
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available