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MATTSON / STEAG / AST 3000

설명

Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)

환경 설정

Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)

OEM 모델 설명

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

문서

파일 아이콘

Mattson AST3000 .pdf

MATTSON / STEAG / AST

3000

verified-listing-icon

검증됨

카테고리

RTP/RTA

마지막 검증일: 60일 이상 전

주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

59880

웨이퍼 사이즈:

8"/200mm, 12"/300mm

빈티지:

알 수 없음

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

유사 등재물

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

빈티지: 2000조건: 중고

마지막 검증일60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

빈티지: 2002조건: 중고

마지막 검증일60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

빈티지: 0조건: 중고

마지막 검증일60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

빈티지: 0조건: 중고

마지막 검증일60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

빈티지: 2007조건: 중고

마지막 검증일60일 이상 전

MATTSON / STEAG / AST

3000

verified-listing-icon

검증됨

카테고리

RTP/RTA

마지막 검증일: 60일 이상 전

listing-photo-11574f2260f74c159302b6b9ae9c23c2-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/46558/11574f2260f74c159302b6b9ae9c23c2/d58498e3a3444410bfd10522301b0215_9b2454eb3fe14ebabc295ac32ccfe3a51201a_mw.jpeg

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주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

59880

웨이퍼 사이즈:

8"/200mm, 12"/300mm

빈티지:

알 수 없음

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

설명

Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)

환경 설정

Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)

OEM 모델 설명

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

문서

파일 아이콘

Mattson AST3000 .pdf

유사 등재물

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA빈티지: 2000조건: 중고마지막 검증일: 60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA빈티지: 2002조건: 중고마지막 검증일: 60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA빈티지: 0조건: 중고마지막 검증일: 60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA빈티지: 0조건: 중고마지막 검증일: 60일 이상 전

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA빈티지: 2007조건: 중고마지막 검증일: 60일 이상 전