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설명
Hitachi SEM S-4160환경 설정
Performance: Rresolution: 2.5 nm at 30kv Magnification: 20X - 300KX Electron Optics: Electron gun: Cold field emmission source, 0.5 - 30 kV Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Pump: Turbo pumped Stage motion: 5 axis motor driven X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors * Option : Changeable into image capture system with LCD Color monitor Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Speciment chamber: DP (570 L/s) Foreline: Rotary pumpOEM 모델 설명
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HITACHI
S-4160
카테고리
SEM / FIB
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
22445
웨이퍼 사이즈:
8"/200mm
빈티지:
2000
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설명
Hitachi SEM S-4160환경 설정
Performance: Rresolution: 2.5 nm at 30kv Magnification: 20X - 300KX Electron Optics: Electron gun: Cold field emmission source, 0.5 - 30 kV Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Pump: Turbo pumped Stage motion: 5 axis motor driven X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors * Option : Changeable into image capture system with LCD Color monitor Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Speciment chamber: DP (570 L/s) Foreline: Rotary pumpOEM 모델 설명
미제공문서
문서 없음