설명
ILINE STEPPER환경 설정
환경 설정 없음OEM 모델 설명
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.문서
문서 없음
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
133128
웨이퍼 사이즈:
8"/200mm
빈티지:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
PAS 5500/250C
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
133128
웨이퍼 사이즈:
8"/200mm
빈티지:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
ILINE STEPPER환경 설정
환경 설정 없음OEM 모델 설명
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.문서
문서 없음