개요

FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5