설명
설명 없음환경 설정
Configuration: -Electrical 3Ø AC 200V 50/60Hz -Rated power 18.7 KVA -Reticle Size 5", Canon STD -Wafer Feeder Type-L -PA Unit 6", O.F Type -Chamber TBW-CD73 -Illuminator FPA-2500 i line -Console version V 5.20A -A Scope i-line, TTL -Θ/Z-Tilt Unit Piezo Stack 3 (L,M,R) -Support Mount Servo Passive Damper 4 -Lamp House 1.5KW 1 -No Missing PartOEM 모델 설명
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5문서
문서 없음
CANON
FPA-2500i3
검증됨
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
15334
웨이퍼 사이즈:
6"/150mm
빈티지:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
CANON
FPA-2500i3
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
15334
웨이퍼 사이즈:
6"/150mm
빈티지:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Configuration: -Electrical 3Ø AC 200V 50/60Hz -Rated power 18.7 KVA -Reticle Size 5", Canon STD -Wafer Feeder Type-L -PA Unit 6", O.F Type -Chamber TBW-CD73 -Illuminator FPA-2500 i line -Console version V 5.20A -A Scope i-line, TTL -Θ/Z-Tilt Unit Piezo Stack 3 (L,M,R) -Support Mount Servo Passive Damper 4 -Lamp House 1.5KW 1 -No Missing PartOEM 모델 설명
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5문서
문서 없음