설명

Canon I-line lithography machine uses a 365nm wavelength light source for exposure. It is a key device for realizing the manufacturing of micron-level semiconductor devices. It has more excellent alignment accuracy and is widely used in the production of 4-inch, 6-inch, 8-inch and 12-inch wafers.

환경 설정

0.35 0.45~0.63 5:1 22*26 60

OEM 모델 설명

The FPA-3000i5 is a Fine Pattern Aligner that can write submicron images on a silicon wafer. It has a 0.35 µm lithography and can process 74 wafers per hour. It has a 0.63 NA and uses the latest off-axis illumination technique (SIA II). The FPA-3000i5 has improved lens performance, better wafer edge chip auto-focusing, and increased illumination intensity. It has a small footprint and a multitasking touch screen operation. It is compatible with Canon’s family of lithography steppers.

문서

문서 없음

CANON

FPA-3000i5

검증됨

카테고리

Steppers & Scanners

마지막 검증일: 60일 이상 전

주요 품목 세부 정보

조건:

Used

작동 상태:

알 수 없음

제품 ID:

131680

웨이퍼 사이즈:

4"/100mm, 6"/150mm, 8"/200mm, 12"/300mm

빈티지:

알 수 없음

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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