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설명
설명 없음환경 설정
* Minimum substrate size: 10x10 mm * Computer programmable recipes on hdd * Lens: Olympus 2142: NA = 0.42; Depth of field = 1.2 um for 0.7 um process * Maximum die size: ~15 mm x 15 mm * Resolution: 500 nm over portion of field; 700 nm over entire field * Mask Plates: 5x5x0.090 inches, 5x reduction, typically Soda Lime Glass (Quartz is also acceptable), no pellicle. * Registration tolerance: Max 0.30 um global alignment; Max 0.15 um local alignment (with care, you can achieve < 0.10 um registration)OEM 모델 설명
The GCA 6300 DSW steppers have chucks for 3", 100 mm, and 150 mm wafers. Pieces smaller than this can also be used but there is no special chuck for this purpose.문서
문서 없음
GCA
6300 DWS
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
118004
웨이퍼 사이즈:
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빈티지:
알 수 없음
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설명
설명 없음환경 설정
* Minimum substrate size: 10x10 mm * Computer programmable recipes on hdd * Lens: Olympus 2142: NA = 0.42; Depth of field = 1.2 um for 0.7 um process * Maximum die size: ~15 mm x 15 mm * Resolution: 500 nm over portion of field; 700 nm over entire field * Mask Plates: 5x5x0.090 inches, 5x reduction, typically Soda Lime Glass (Quartz is also acceptable), no pellicle. * Registration tolerance: Max 0.30 um global alignment; Max 0.15 um local alignment (with care, you can achieve < 0.10 um registration)OEM 모델 설명
The GCA 6300 DSW steppers have chucks for 3", 100 mm, and 150 mm wafers. Pieces smaller than this can also be used but there is no special chuck for this purpose.문서
문서 없음