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Lens Data AttachedOEM 모델 설명
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.문서
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NIKON
NSR-S204B
카테고리
Steppers & Scanners
마지막 검증일: 8일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Running
제품 ID:
126577
웨이퍼 사이즈:
8"/200mm
빈티지:
2001
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