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설명
설명 없음환경 설정
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM 모델 설명
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)문서
문서 없음
유사 등재물
모두 보기
NIKON
NSR-SF200
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
53557
웨이퍼 사이즈:
8"/200mm
빈티지:
2003
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설명
설명 없음환경 설정
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM 모델 설명
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)문서
문서 없음