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설명
설명 없음환경 설정
-Handedness: Inline left (std) or right -Altitude: Varies by site -Lens Type: 4aN8EK (D type lens) -Numerical Aperture: 0.85~1.35 -sPURE (subject to availability) -Quick Reticle Change (QRC) -Aerial Image Sensor (AIS) -AIS-RA (AIS-Reticle Alignment) -iPot(integrated projection optics tester) -5-eye Field Image Alignment system (FIA) -Excimer laser with Advanced Spectral Control (ASC) -Hard Aperture: 11slots (Cross Hair, Annular, AIS-coma etc) -POLANO -Beam Matching Unit -25-wafer FOUP port -Pre-alignment matching to other NSR -6" reticle size -Position of Reticle SMIF loadport: Right hand operation -2 Reticle SMIF loadports -12-slot reticle buffer -SEMI 2D Reticle Barcode Reader -Reticle Prealignment -Reticle Autofocus -PPD(Pellicle Particle Detector) -PPD Pellicle Height Error Warning -CDA Purge Kit Systems Computers: -UIP (Operational Computer) Operating System: Windows Embedded -SQP (Sequence Processing Computer) Operating System: VMS -SVR (File Server) Operation System: Linux -eXDP (Data Collection Server) Operation System: Windows SeverOEM 모델 설명
NSR-S621D (resolution ≦ 38 nm).문서
문서 없음
NIKON
NSR-S621D
카테고리
Steppers & Scanners
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
103696
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
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설명
설명 없음환경 설정
-Handedness: Inline left (std) or right -Altitude: Varies by site -Lens Type: 4aN8EK (D type lens) -Numerical Aperture: 0.85~1.35 -sPURE (subject to availability) -Quick Reticle Change (QRC) -Aerial Image Sensor (AIS) -AIS-RA (AIS-Reticle Alignment) -iPot(integrated projection optics tester) -5-eye Field Image Alignment system (FIA) -Excimer laser with Advanced Spectral Control (ASC) -Hard Aperture: 11slots (Cross Hair, Annular, AIS-coma etc) -POLANO -Beam Matching Unit -25-wafer FOUP port -Pre-alignment matching to other NSR -6" reticle size -Position of Reticle SMIF loadport: Right hand operation -2 Reticle SMIF loadports -12-slot reticle buffer -SEMI 2D Reticle Barcode Reader -Reticle Prealignment -Reticle Autofocus -PPD(Pellicle Particle Detector) -PPD Pellicle Height Error Warning -CDA Purge Kit Systems Computers: -UIP (Operational Computer) Operating System: Windows Embedded -SQP (Sequence Processing Computer) Operating System: VMS -SVR (File Server) Operation System: Linux -eXDP (Data Collection Server) Operation System: Windows SeverOEM 모델 설명
NSR-S621D (resolution ≦ 38 nm).문서
문서 없음