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설명
Chemical Mechanical Polisher환경 설정
POWER: 208, 380, 460 Vac, 3 phase, 50/60 Hz DI WATER: Peak Flow: 12 gallons per minute (gpm) (45.4 I/m, Average Flow: 6 gpm (22.7 1/min), Pressure: 25 to 30 psi, minimum CHILLED WATER: Peak Flow: 5 gpm (18.9 l/min) COMPRESSED AIR: Peak Flow: 6 standard cubic feet per minute (SCFN) (170 SLM) NITROGEN: Peak Flow 10 SCFM (283 SLM) DIMENSIONS SPECIFICATION: Width: 207.62 in (5273.55 mm Depth: 131.74 in (3346.20 mm Height: 92.0 in (2336.8 mm Weight: Approximately 7500 Ibs. (3410 Kg)OEM 모델 설명
The IPEC 472 wafer polisher is a fully automated, precision tool for CMP polishing of semiconductor wafers used to achieve flatness, uniformity, and planarization on patterned/device wafers. The 472 features automatic wafer handling and is capable of two platen, two-step polishing processing to maximize wafer throughput capability and quality. Designed to planarize wafers from 100mm to 200mm, the 472 is ideally suited for materials polishing applications that require repeatability with operational and processing flexibility.문서
카테고리
Wafer Polishing
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
19761
웨이퍼 사이즈:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
IPEC / WESTECH
AVANTI 472
카테고리
Wafer Polishing
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
19761
웨이퍼 사이즈:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available