설명
설명 없음환경 설정
the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!). Inline heater for media and DI Main unit: 12-inch system with handler/gripper with flip option; Pinchuck Intermediate tanks with Trebor pumps Levitronix flow meters for heater flow sometimes cause problems FFU was converted to a different controller/fan (see photos) Chemistry cabinets: Cabinet 1: Main tank (40L) with buffer tank and buffer function Cabinet 2: Main tank (40L) with buffer tank and buffer function Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function The chemistry computer motherboard was replaced with a different one A weld on the drain in Chemistry Cabinet 3 was repairedOEM 모델 설명
The SEZ SP304 is a single chamber system that can handle up to three chemicals. It is compatible with both 200mm and 300mm wafer sizes.문서
카테고리
Wet Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
125813
웨이퍼 사이즈:
6"/150mm, 12"/300mm
빈티지:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP304
카테고리
Wet Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
125813
웨이퍼 사이즈:
6"/150mm, 12"/300mm
빈티지:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available