설명
설명 없음환경 설정
300mm optional 200mm Incl chiller, pumps, gasboxes decomissioned in working conditioning, in production till April 2022 System comes incl following spare parts. Spare chamber module, All quarts parts used for 1 chamber Main Computer Microwave 3 pieces Lampcontrollers etc. Lamps approx. 75 pieces Touchscreen SMC foreline valve Throttle valve Edwards IH1800NRV pumps only 12.000 /10.000 Hrs running timeOEM 모델 설명
The FusionES3 is a 300mm plasma asher with dry strip capabilities, designed for post-implant and post-etch process steps. It has a flexible process architecture, making it suitable for conventional and dual damascene process flows. It provides dry resist and residue removal, and its elevated ash rate delivers high throughput and productivity. The tool is designed to run oxidizing, fluorinated, and reducing chemistries. Its unique dual-chamber platform enables dry strip and residue removal to be performed within a single chamber, increasing productivity and reducing the system footprint.문서
문서 없음
카테고리
Ashers / Plasma Cleaner
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
65306
웨이퍼 사이즈:
12"/300mm
빈티지:
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
AXCELIS / FUSION
FUSION ES3
카테고리
Ashers / Plasma Cleaner
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
65306
웨이퍼 사이즈:
12"/300mm
빈티지:
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
300mm optional 200mm Incl chiller, pumps, gasboxes decomissioned in working conditioning, in production till April 2022 System comes incl following spare parts. Spare chamber module, All quarts parts used for 1 chamber Main Computer Microwave 3 pieces Lampcontrollers etc. Lamps approx. 75 pieces Touchscreen SMC foreline valve Throttle valve Edwards IH1800NRV pumps only 12.000 /10.000 Hrs running timeOEM 모델 설명
The FusionES3 is a 300mm plasma asher with dry strip capabilities, designed for post-implant and post-etch process steps. It has a flexible process architecture, making it suitable for conventional and dual damascene process flows. It provides dry resist and residue removal, and its elevated ash rate delivers high throughput and productivity. The tool is designed to run oxidizing, fluorinated, and reducing chemistries. Its unique dual-chamber platform enables dry strip and residue removal to be performed within a single chamber, increasing productivity and reducing the system footprint.문서
문서 없음