설명
Dimensions & weight estimates: Mainframe dim (cm): 85 x 110 x 155 Mainframe weight (kg): 200환경 설정
Gasonics L3510 - Asher 200mm convertible: Yes Robot upgrade: HINE Hatm 5.0 atmospheric robot arm Process Gasses: O2 and N2OEM 모델 설명
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.문서
문서 없음
카테고리
Ashers / Plasma Cleaner
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
132530
웨이퍼 사이즈:
6"/150mm
빈티지:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH / NOVELLUS / GASONICS
L3510
카테고리
Ashers / Plasma Cleaner
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
132530
웨이퍼 사이즈:
6"/150mm
빈티지:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Dimensions & weight estimates: Mainframe dim (cm): 85 x 110 x 155 Mainframe weight (kg): 200환경 설정
Gasonics L3510 - Asher 200mm convertible: Yes Robot upgrade: HINE Hatm 5.0 atmospheric robot arm Process Gasses: O2 and N2OEM 모델 설명
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.문서
문서 없음