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설명
-Dimensions: 80cm * 85cm * 188cm -Weight: 330kg환경 설정
-Non-patterned surface inspection system -0.12 micron defect sensitivity @ 95% capture, based on PSL Standards -0.02 ppm haze sensitivity -Wavelength 488 nm, 30mw Ar laser, blue laser, spot size 90μ -Scan frequency 170 Hz; scan pitch: 10, 20 and 40μ -Throughput 120/6" wph -Single puck handling from single cassette or platform -Win 98 software, CD ROM writer, software version: 4.2 -XY coordinates, GEM SECS: options availableOEM 모델 설명
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.문서
문서 없음
카테고리
Defect Inspection
마지막 검증일: 29일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Idle
제품 ID:
113988
웨이퍼 사이즈:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
빈티지:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
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KLA
SURFSCAN 6420
카테고리
Defect Inspection
마지막 검증일: 29일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Idle
제품 ID:
113988
웨이퍼 사이즈:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
빈티지:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
-Dimensions: 80cm * 85cm * 188cm -Weight: 330kg환경 설정
-Non-patterned surface inspection system -0.12 micron defect sensitivity @ 95% capture, based on PSL Standards -0.02 ppm haze sensitivity -Wavelength 488 nm, 30mw Ar laser, blue laser, spot size 90μ -Scan frequency 170 Hz; scan pitch: 10, 20 and 40μ -Throughput 120/6" wph -Single puck handling from single cassette or platform -Win 98 software, CD ROM writer, software version: 4.2 -XY coordinates, GEM SECS: options availableOEM 모델 설명
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.문서
문서 없음