설명

De-installed

환경 설정

-Electric source: 208V/1Ph/16A -Non-patterned wafer film surface analyzer -One automatic wafer handler -Defect map and histogram with zoom -2D signal integration -Non-contaminating robotic handler -X-Y Coordinates Software -Random access sender/receiver unit

OEM 모델 설명

The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.