설명
Metal Etch환경 설정
Software: Envision 2.0-068 Main Chamber - Fixed Gap ESC - Metal Etch ESC - Anodized Aluminum VAT 65 Pressure Controller Leybold Mag1500 High Temp Turbo PLL - DSQ Strip Chamber APM - Atmospheric passivation Heated Paddle (1) Orbital Weld Gas Box (2) - Unit UFC 1200A (2) - Unit 1661 Multiflow (3) - Horiba Z500 (1) - Horiba Z300 (1) - Celerity VC-4900VRH Lam Harmonic arm drives (2) Dry Pumps: Busch BA100 (1) Edwards iQDP80 (1) Edwards iQDP80 w/Leybold WSU501 Blower (1) Chillers: M and W Single Ch TCU - RPCX28A-3.OHE-RNB Remote AC Box Delatech SD101 Wet ScrubberOEM 모델 설명
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 오늘
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
119772
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH CORPORATION
TCP 9600SE
카테고리
Dry / Plasma Etch
마지막 검증일: 오늘
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
119772
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Metal Etch환경 설정
Software: Envision 2.0-068 Main Chamber - Fixed Gap ESC - Metal Etch ESC - Anodized Aluminum VAT 65 Pressure Controller Leybold Mag1500 High Temp Turbo PLL - DSQ Strip Chamber APM - Atmospheric passivation Heated Paddle (1) Orbital Weld Gas Box (2) - Unit UFC 1200A (2) - Unit 1661 Multiflow (3) - Horiba Z500 (1) - Horiba Z300 (1) - Celerity VC-4900VRH Lam Harmonic arm drives (2) Dry Pumps: Busch BA100 (1) Edwards iQDP80 (1) Edwards iQDP80 w/Leybold WSU501 Blower (1) Chillers: M and W Single Ch TCU - RPCX28A-3.OHE-RNB Remote AC Box Delatech SD101 Wet ScrubberOEM 모델 설명
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.문서
문서 없음