설명
LAM 9400 PTX 3 Chamber Parts Tool환경 설정
Total 3 chambers 06MF – all intact, VCE board for A and B not available 06PM1 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM3 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM4 – chamber intact, no generator, no match, dip board and auto-tune board no available Tranfers robot is faulty – fuse blown Software PC – formatted- need to install LAM software All chamber gas box are intactOEM 모델 설명
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.문서
문서 없음
카테고리
Dry / Plasma Etch
마지막 검증일: 9일 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
알 수 없음
제품 ID:
153995
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
LAM RESEARCH CORPORATION
TCP 9400
카테고리
Dry / Plasma Etch
마지막 검증일: 9일 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
알 수 없음
제품 ID:
153995
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
LAM 9400 PTX 3 Chamber Parts Tool환경 설정
Total 3 chambers 06MF – all intact, VCE board for A and B not available 06PM1 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM3 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM4 – chamber intact, no generator, no match, dip board and auto-tune board no available Tranfers robot is faulty – fuse blown Software PC – formatted- need to install LAM software All chamber gas box are intactOEM 모델 설명
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.문서
문서 없음