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NO3 Host console- 100*325*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition - Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A환경 설정
환경 설정 없음OEM 모델 설명
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유사 등재물
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ULVAC
NE-950EX
카테고리
Dry / Plasma Etch
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
108665
웨이퍼 사이즈:
알 수 없음
빈티지:
2010
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설명
NO3 Host console- 100*325*210 cm/1500 Nameplate- NE-950EXt Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition - Normal, no missing parts Damage description- None Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2 Current- Three-phase five-wire 208V/120A환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음